发明名称 ELECTRONIC DEVICE AND FABRICATION METHOD THEREOF
摘要 An electronic device 1 has a first semiconductor substrate 2 on which a bonding projection section 42 is projected via an insulation film 41, a second semiconductor substrate 3 that is bonded by welding the bonding projection section 42 of the first semiconductor substrate 2 via conductive bonding material, a through hole 54 that is formed to penetrate the bonding projection section 42 and the insulation film 41 in a bonding direction, and a conduction wiring section 44 that is formed by the conductive bonding material filled in the through hole 54 at a time of bonding by welding and conducts the first semiconductor substrate 2 with the second semiconductor substrate 3 to have same electric potential.
申请公布号 US2013207277(A1) 申请公布日期 2013.08.15
申请号 US201013703810 申请日期 2010.06.21
申请人 NODA NAOKI;KOARAI MITSURU;YOKOUCHI TOSHIO;ISHIMORI MASAHIRO;PIONEER MICRO TECHNOLOGY CORPORATION;PIONEER CORPORATION 发明人 NODA NAOKI;KOARAI MITSURU;YOKOUCHI TOSHIO;ISHIMORI MASAHIRO
分类号 H01L23/538;H01L21/02 主分类号 H01L23/538
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