| 摘要 |
PROBLEM TO BE SOLVED: To provide an environmental sensor element and an environmental sensor that enable miniaturization and reduction in thickness and that operate with low-power consumption.SOLUTION: An environmental sensor element 1 comprises: a vibration piece 10 including two vibration legs 11, 12, a center leg 13 arranged between the two vibration legs, a coupling part 14 coupling one end of the center leg 13 with respective one ends of the two vibration legs 11, 12, and a support part 15 coupling with the other end of the center legs 13; and a gas sensitive membrane 20 formed on the two vibration legs 11, 12. Also, the vibration piece 10 is constructed to be supported at one position of the center leg 13 and two positions of the support part 15 that make three positions in total. Thus, miniaturization and reduction in thickness can be achieved for the environmental sensor element and a small CI (Crystal Impedance) value can provide an environmental sensor operating with low-power consumption. |
