| 摘要 |
<p>The purpose of the present invention is to provide a charged particle beam apparatus, wherein static electricity is effectively removed from an electrostatic chuck. In order to achieve the purpose, the present invention provides a charged particle beam apparatus that is provided with a sample chamber, in which a space having an electrostatic chuck mechanism (5) therein is maintained in a vacuum state. The charged particle beam apparatus is characterized in that: the apparatus is provided with an ultraviolet light source (6) for irradiating the inside of the sample chamber with ultraviolet light, and a member to be irradiated with the ultraviolet light; and that the member is disposed in the perpendicular line direction of an attracting surface of the electrostatic chuck.</p> |
