Method and System for Improving Alignment Precision of Parts in MEMS

摘要

Methods for improving alignment precision of two parts of an electronic device are disclosed. Two parts are stacked with an intervening rolling element having a first diameter. One part can pivot relative to the other part about the rolling element to bring the two parts into alignment. The pivoting can be achieved by imposing a z-direction force on the parts, such as a magnetic force. The aligned parts can be locked by solidification of solder. Prior to the pivoting step, the one rolling element can be held on one of said two parts using a thermally dissipative material that comprises glycerol.