Bearing device for mirror of mirror arrangement for projection exposure system, has three supports, and support bearing, which is formed such that only force component is transferred in direction opposite to gravitational force

摘要

The bearing device has three supports (102,103,104) in a support area corresponding to the edge area of the mirror. The mirror is supported on the supports. A support bearing (105) is provided in addition to the three supports in the support area, which is centrally arranged to the support area and in the central area of the mirror. An additional support bearing is arranged in the support area. The support bearing is formed such that only a force component is transferred in a direction opposite to the gravitational force. Independent claims are included for the following: (1) a mirror arrangement for a projection exposure system; and (2) a method for supporting a mirror of a projection exposure system, particularly for operating a bearing device.