发明名称 Forming a vitrified sample for an electron microscopy
摘要 The invention relates to a method of forming a vitrified sample on a sample holder (112) for inspection in an electron microscope (100, 106). It is known to spray a solution on a grid and then immerse the grid in a cryogenic liquid, such as ethane or liquid nitrogen. The invention proposes to spray (via 118) small droplets of the liquid on a cryogenic surface (112), such as a grid or a sample holder in vacuum. The liquid forms vitrified sample material (200, 202) when hitting the surface due to the low temperature of the grid or sample holder. A lamella may be excavated from the thus formed sample material, to be studied in a TEM, or the vitrified sample material may be directly observed in a SEM. In an embodiment the material may be sprayed on a cryogenic liquid, to be scooped from the liquid and placed on a grid.
申请公布号 EP2626886(A2) 申请公布日期 2013.08.14
申请号 EP20130154508 申请日期 2013.02.08
申请人 FEI COMPANY 发明人 MULDERS, JOHANNES;SCHAMPERS, RUUD;PIET, TROMPENAARS
分类号 H01J37/28;G01N1/42 主分类号 H01J37/28
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