发明名称 BEOL anti-fuse structures for gate last semiconductor devices
摘要 An approach is provided for semiconductor devices including an anti-fuse structure. The semiconductor device includes a first metallization layer including a first portion of a first electrode and a second electrode, the second electrode being formed in a substantially axial plane surrounding the first portion of the first electrode, with a dielectric material in between the two electrodes. An ILD is formed over the first metallization layer, a second metallization layer including a second portion of the first electrode is formed over the ILD, and at least one via is formed through the ILD, electrically connecting the first and second portions of the first electrode. Breakdown of the dielectric material is configured to enable an operating current to flow between the second electrode and the first electrode in a programmed state of the anti-fuse structure.
申请公布号 US8507326(B2) 申请公布日期 2013.08.13
申请号 US201113232681 申请日期 2011.09.14
申请人 KURZ ANDREAS;POPPE JENS;GLOBALFOUNDRIES INC. 发明人 KURZ ANDREAS;POPPE JENS
分类号 H01L21/82 主分类号 H01L21/82
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