| 发明名称 |
Switchable antireflective coatings |
| 摘要 |
An antireflective coating compositions comprising (I) a silsesquioxane resin (II) a compound selected from photo-acid generators and thermal acid generators; and (III) a solvent wherein in the silsesquioxane resin contains a carboxylic acid forming group or a sulfuric acid forming group.
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| 申请公布号 |
US8507179(B2) |
申请公布日期 |
2013.08.13 |
| 申请号 |
US200913133175 |
申请日期 |
2009.10.19 |
| 申请人 |
FU PENG-FEI;MOYER ERIC;SUHR JASON;DOW CORNING CORPORATION |
发明人 |
FU PENG-FEI;MOYER ERIC;SUHR JASON |
| 分类号 |
G03F7/00;G03F7/11 |
主分类号 |
G03F7/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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