发明名称 |
Microengineered multipole ion guide |
摘要 |
A microengineered multipole ion guide for use in miniature mass spectrometer systems is described. Exemplary methods of mounting rods in hexapole, octupole, and other multipole geometries are described. The rods forming the ion guide are supported in etched silicon structures defined in at least first and second substrates.
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申请公布号 |
US8507847(B2) |
申请公布日期 |
2013.08.13 |
申请号 |
US201113053914 |
申请日期 |
2011.03.22 |
申请人 |
WRIGHT STEVEN;O'PREY SHANE MARTIN;MICROSAIC SYSTEMS PLC |
发明人 |
WRIGHT STEVEN;O'PREY SHANE MARTIN |
分类号 |
H01J49/26 |
主分类号 |
H01J49/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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