| 摘要 |
PURPOSE: A manufacturing method of biosensor is provided to freely control a position of a carbon micro / nanowire, number, structure etc., lower a production cost of a sensor by using a nanowire base and improve productivity. CONSTITUTION: A manufacturing method of a biosensor comprises: a step of forming an insulating layer in an electrode area; a step of coating a first photoresist on the insulating layer; a step of firstly exposing a first electrode area with a first photomask; a step of developing a remaining part except the first electrode area; a step of coating a second photoresist in the first electrode area and upper insulating layer; a step of secondly exposing a second electrode area with a second photomask; a step of thirdly exposing the photoresist between second electrode areas to wire-type of the micro size with the photomask of wire-type; a step of developing the photoresist which is not exposed; a step of forming a carbon electrode which has overlapped form, a carbon wire and a carbon probe by pyrolysing the first and the second electrode area and wire; a step of forming a passivation layer on the carbon wire. [Reference numerals] (AA) Start; (BB) End; (S110) Step of forming an insulating layer in an electrode area and multiple electrode area; (S120) Step of coating a first photoresist on the insulating layer; (S130) Step of firstly exposing a first electrode area with a first photomask; (S140) Step of developing a remaining part except the first electrode area; (S150) Step of coating a second photoresist in the first electrode area and upper insulating layer; (S160) Step of secondly exposing a second electrode area with a second photomask; (S170) Step of thirdly exposing the photoresist between second electrode areas to wire-type of the micro size with the photomask of wire-type; (S180) Step of developing the photoresist which is not exposed; (S190) Step of forming a carbon electrode which has overlapped form, a carbon wire and a carbon probe by pyrolysing the first and the second electrode area and wire; (S200) Step of forming a passivation layer on the carbon wire |
