| 摘要 |
A surface shape measurement method that divides a surface shape of an object (107) into a plurality of partial regions (201, 202, 203, 204) to obtain partial region data and that stitches the partial region data to measure the surface shape of the object, and the method includes the steps of calculating sensitivity of an error generated by a relative movement between the object and a sensor (110) for each of the partial regions, dividing the surface shape of the object into the plurality of partial regions to obtain the partial region data, obtaining the partial region data, calculating an amount corresponding to the error using the sensitivity, correcting the partial region data using the amount corresponding to the error, and stitching the corrected partial region data to calculate the surface shape of the object.
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