| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity detection element enabling a worker to determine whether an overload of high frequency is applied on a force detection element or not, an electronic apparatus, and an overload detecting method.SOLUTION: A physical quantity detection element includes: a base substrate 12; a fixed plate 34 disposed on the base substrate 12; a moving plate 40 cantilever-supported to the fixed plate 34, and receiving force to displace on the basis of a position of the fixed plate 34; and a frequency changing type force detection element (a piezoelectric vibration piece 44) connected over the fixed plate 34 and the moving plate 40. The physical quantity detection element has a moving electrode 56 disposed on the moving plate 40; a fixed electrode 26 disposed on the base substrate 12; and a monitoring circuit 68 (Fig.6) for outputting an overload signal on the basis of the changes of capacitance between the moving electrode 56 and the fixed electrode 26. |
