发明名称 VAPOR DEPOSITION METHOD OF ORGANIC POLYMER THIN FILM, AND PREPARATION METHOD OF ENCAPSULATION FILM USING SAME
摘要 <p>According to one embodiment of the present invention, provided is a preparation method of an encapsulation film under vapor phase conditions, comprising the steps of: providing a monomer on an inorganic film constituting the encapsulation film in a reactor; providing an initiator in the reactor; thermally decomposing the initiator to form a free radical; and activating the monomer using the free radical so as to form an organic polymer thin film on the inorganic film, wherein the encapsulation film is an organic-inorganic composite film, a solvent is not used in the steps, and a process for forming the inorganic film and a step for forming the organic polymer thin film are carried out in a single vacuum process.</p>
申请公布号 WO2013115509(A1) 申请公布日期 2013.08.08
申请号 WO2013KR00363 申请日期 2013.01.17
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 IM, SUNG GAP
分类号 H01L51/56;H05B33/04 主分类号 H01L51/56
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