| 摘要 |
<p>The purpose of the present invention is to provide a structure for an excimer lamp having an arc tube of a transverse cross section that is a flattened, generally square shape comprising a pair of flat wall portions and side wall portions connecting the flat wall portions, a pair of electrodes being disposed on the outside surfaces of the flat wall portions, whereby cracks that could lead to failure in the flat wall portions exposed to the discharge column do not occur; and to further provide a simplified method for production of the arc tube. The present invention is characterized in that the thickness of the flat wall portions of the arc tube is greater than the thickness of the side wall portions. The present invention is also characterized by comprising: a step for heating a cylindrical glass tube by a burner from a first direction to form a first flat wall portion; and a step of heating by a burner from a second direction opposite the first direction, to form a second flat wall portion.</p> |
