| 摘要 |
PROBLEM TO BE SOLVED: To provide an aspherical shape measuring method, a shape measuring program, and a shape measuring device which can measure a test aspherical surface with high accuracy and at high speed.SOLUTION: An interference fringe image is obtained by detecting interference light. A shape of a vertical incidence region 32 in which a measuring beam vertically enters a test aspherical surface in null regions 30, 31 on the interference fringe image is calculated with high accuracy. A shape of a non-vertical incidence region 33 which is a region other than the vertical incidence region in the null regions 30, 31 is calculated as a relative shape of the vertical incidence region. |
