发明名称 EPITAXY LEVEL PACKAGING
摘要 A method of growth and transfer of epitaxial structures from semiconductor crystalline substrate(s) to an assembly substrate. Using this method, the assembly substrate encloses one or more semiconductor materials and defines a wafer size that is equal to or larger than the semiconductor crystalline substrate for further wafer processing. The process also provides a unique platform for heterogeneous integration of diverse material systems and device technologies onto one single substrate.
申请公布号 US2013200429(A1) 申请公布日期 2013.08.08
申请号 US201213724155 申请日期 2012.12.21
申请人 PAN ERIC TING-SHAN 发明人 PAN ERIC TING-SHAN
分类号 H01L21/78;H01L21/768;H01L23/498 主分类号 H01L21/78
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