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发明名称
SOURCE POWER SUPPLYING UINT OF CHEMICAL VAPOR DEPOSITION APPARATUS
摘要
申请公布号
KR20130088628(A)
申请公布日期
2013.08.08
申请号
KR20120009992
申请日期
2012.01.31
申请人
CHARM ENGINEERING CO., LTD.
发明人
KIM, IK LAE;JO, YOUNG JIN;BYUN, IN JAE
分类号
C23C16/455;C23C16/44;H01L21/205
主分类号
C23C16/455
代理机构
代理人
主权项
地址
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