发明名称
摘要 PROBLEM TO BE SOLVED: To provide a method for easily forming a region with conductivity and high wettability without a step for removing a photocatalytic reaction layer, which is formed over a conductive layer. SOLUTION: The photocatalytic reaction layer is formed over a photocatalytic conductive layer, and the photocatalytic conductive layer is irradiated with ultraviolet light to form a region with conductivity and higher wettability than the photocatalytic reaction layer on a surface of the photocatalytic conductive layer which is irradiated with ultraviolet light, wherein as the photocatalytic conductive layer, a layer having a photocatalytic property of which resistivity is≤1×10<SP>-2</SP>Ωcm can be used. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP5254589(B2) 申请公布日期 2013.08.07
申请号 JP20070267546 申请日期 2007.10.15
申请人 发明人
分类号 H01L21/336;H01L21/28;H01L21/3205;H01L21/768;H01L23/532;H01L29/417;H01L29/786;H01L51/05;H01L51/40;H01L51/50;H05B33/10;H05B33/14 主分类号 H01L21/336
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