OPTICAL PYROMETRY AND APPARATUS FOR PROCESSING SEMICONDUCTOR BY EMPLOYING THE SAME,申请号KR20120009205-传众专利搜索

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发明名称	OPTICAL PYROMETRY AND APPARATUS FOR PROCESSING SEMICONDUCTOR BY EMPLOYING THE SAME
摘要
申请公布号	KR20130087933(A)	申请公布日期	2013.08.07
申请号	KR20120009205	申请日期	2012.01.30
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	HUR, IN HOE;SHIN, DONG MYUNG;HONG, JONG PA;KIM, CHOO HO;JI, WON SOO;KIM, JUN WOO
分类号	H01L21/66;H01L21/205	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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