There are disclosed sulfonic acid precursor compositions, as are methods of using these compositions in, for example, photolithography. Other embodiments are also disclosed.
申请公布号
US8501382(B1)
申请公布日期
2013.08.06
申请号
US20100708958
申请日期
2010.02.19
申请人
BRAINARD ROBERT L.;THE RESEARCH FOUNDATION OF STATE UNIV. OF NEW YORK