发明名称 |
Method of determining a characteristic |
摘要 |
A plurality of targets including a second population superimposed on a first population are formed. In the first target the second population has an asymmetry with respect to the first population. In the second target the second population has a different asymmetry with respect to the first population. Reflected radiation is detected from both the targets and used to determine different characteristics of the underlying populations.
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申请公布号 |
US8502955(B2) |
申请公布日期 |
2013.08.06 |
申请号 |
US20090641742 |
申请日期 |
2009.12.18 |
申请人 |
MEGENS HENRICUS JOHANNES LAMBERTUS;QUAEDACKERS JOHANNES ANNA;LEEWIS CHRISTIAN MARINUS;VANOPPEN PETER CLEMENT PAUL;ASML NETHERLANDS B.V. |
发明人 |
MEGENS HENRICUS JOHANNES LAMBERTUS;QUAEDACKERS JOHANNES ANNA;LEEWIS CHRISTIAN MARINUS;VANOPPEN PETER CLEMENT PAUL |
分类号 |
G03B27/42 |
主分类号 |
G03B27/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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