发明名称 Semiconductor device
摘要 A lateral high-breakdown voltage semiconductor device is provided in which the breakdown voltages of elements as a whole are improved, while suppressing increases in cell area. A track-shape gate electrode surrounds a collector electrode extending in a straight line, a track-shape emitter electrode surrounds the gate electrode, and a track-shape first isolation trench surrounds the emitter electrode. A second isolation trench surrounds the first isolation trench. The region between the first isolation trench and the second isolation trench is an n-type isolation silicon region. The isolation silicon region is at the same potential as the emitter electrode. In the cross-sectional configuration traversing the gate electrode, the depth of the p base region in an interval corresponding to an arc-shape portion of the gate electrode is shallower than the depth of the p base region in an interval corresponding to a straight-line portion of the gate electrode.
申请公布号 US8502344(B2) 申请公布日期 2013.08.06
申请号 US20090411836 申请日期 2009.03.26
申请人 LU HONG-FEI;FUJI ELECTRIC CO., LTD. 发明人 LU HONG-FEI
分类号 H01L29/66 主分类号 H01L29/66
代理机构 代理人
主权项
地址