METHOD FOR DRYING SILICON SLUDGE

摘要

PURPOSE: A silicone sludge drying method is provided to recycle silicone sludge generated during semiconductor and solar wafer processing processes using a microwave drying method. CONSTITUTION: A silicone sludge drying method is as follows. A conveyor belt (140) sends silicone sludge to a microwave drying chamber (110). The silicone sludge is heated in the microwave drying chamber at a temperature of 40-100 degrees using microwaves to remove oil from the silicone sludge. The silicone sludge comprises silicone and 50-80 weight% of SiC. The conveyor belt is a mesh belt composed of mesh apertures. [Reference numerals] (116) O2 sensor; (120) Controller