发明名称 SEMICONDUCTOR DEVICE AND METHOD OF AUTOMATICALLY INSPECTING AN APPEARANCE OF THE SAME
摘要 The invention provides a semiconductor device and a method of automatically inspecting the appearance, which achieves proper recognition of the size of a chipping occurring from an end portion of the semiconductor device toward the element forming region by an automatic appearance inspection machine, and prevents a problem of judging an appearance non-defective product as an appearance defective product. A semiconductor device includes a resin layer extending from an element forming region over a guard ring surrounding the element forming region so as to cover these except a plurality of portions of the guard ring, and a chipping extending from a chip end portion of a semiconductor device toward the end portion of the resin layer. An end portion of the guard ring partially exposed from the resin layer is used as a reference to measure a distance y from the end portion of the guard ring to the end portion of the chipping and a distance x from the end portion of the guard ring to the end portion of the resin layer. The device is judged as an appearance non-defective product when y is larger than x or is judged as an appearance defective product when y is equal to x or y is smaller than x.
申请公布号 US2013192078(A1) 申请公布日期 2013.08.01
申请号 US201313750708 申请日期 2013.01.25
申请人 YOSHIMI HIDEAKI;ISHIBE SHINZO;KUROSE EIJI 发明人 YOSHIMI HIDEAKI;ISHIBE SHINZO;KUROSE EIJI
分类号 G01B21/02;H01L23/544 主分类号 G01B21/02
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