METHOD AND APPARATUS FOR TREATING ORGANIC FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for treating an organic film, which is capable of uniformly polymerizing and curing the whole of an organic film formed on one main surface of a substrate to be treated.SOLUTION: The method for treating an organic film includes a first step in which an organic film 103A formed on one main surface 102a of a substrate 102 to be treated is arranged in a pressure-reduced space and is polymerized and cured using light L emitted from plasma P.