| 摘要 |
A multiwavelength interferometer (200,300) includes a light beam splitter (8) that separates each of a plurality of light beams having wave lengths different from each other into measuring light and reference light, an interference signal generator (100) that generates an interference signal of interference light of the reference light and reflected light obtained by illuminating the measuring light on a surface (27) to be measured to be reflected on the surface for each wavelength, an illumination state changer (25) that changes an illumination state of the measuring light on the surface, a detector (222a, 222b) that detects the interference signal while the illumination state is changed, and a measurement unit (23) that measures a position of the surface using phases of a plurality of interference signals for each wavelength and intensity information of at least one interference signal of the plurality of interference signals.
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