发明名称 FLOW SENSOR
摘要 An apparatus according to the invention and a corresponding method can be used to determine a flow rate of a flow medium (2) in a simple and contact-free manner using an arrangement which is area-symmetrical to a cross-sectional area. The flow medium (2) flows through the cross-sectional area, wherein a cooling region (3) is arranged on and symmetrically to the cross-sectional area on or in the line body (1). Two temperature sensors (4, 5) which are arranged symmetrically to the cross-sectional area are additionally used. Since thermal energy is removed from a hot flow medium (2), detection can be carried out below activation temperatures for chemical reactions. The apparatus is produced in miniaturized form in a microfluidic system in the form of a ceramic multilayer circuit carrier.
申请公布号 WO2013110603(A1) 申请公布日期 2013.08.01
申请号 WO2013EP51132 申请日期 2013.01.22
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 MATZ, RICHARD
分类号 G01F1/684 主分类号 G01F1/684
代理机构 代理人
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