| 摘要 |
PROBLEM TO BE SOLVED: To provide a test surface shape calculation device capable of calculating a shape of a surface at high speed even when the surface is an aspheric surface.SOLUTION: A test surface shape calculation device is provided which includes: an imaging element; an interferometer optical system which separates light emitted from a light source to be reference light and test light, and causes the reference light and the test light reflected on a concave test surface to interfere with each other on an imaging element surface of the imaging element, and in which an optical element allowing the test light to pass therethrough is not provided between the test surface and the imaging element surface; complex amplitude calculation means which analyzes an interference fringe image captured by the imaging element, and calculates a complex amplitude including phase information and amplitude information of the test light on the imaging element surface; and shape calculation means which causes the complex amplitude, calculated by the complex amplitude calculation means, to be propagated through an optical wave to a reproduction surface where the test surface is provided, so as to calculate a shape of the test surface. |
