发明名称 ACOUSTIC WAVE RECEIVING APPARATUS
摘要 Use of an acoustic wave receiving apparatus which includes: a resonator including a first mirror (301) on which measurement light (305) is incident, a second mirror (302) which is arranged to face the first mirror and on which acoustic waves (307) from an object are incident, an acoustic wave reception layer (304) interposed between the first mirror and the second mirror, and a compensation layer (309); and a detector for detecting a variation in an optical path length between the first mirror and the second mirror that occurs in response to deformation of the acoustic wave reception layer caused by incidence of the acoustic waves, wherein the variation in the optical path length due to a film thickness distribution of the acoustic wave reception layer is compensated by refraction in the compensation layer.
申请公布号 WO2012161340(A3) 申请公布日期 2013.08.01
申请号 WO2012JP63825 申请日期 2012.05.23
申请人 CANON KABUSHIKI KAISHA;ASAO, YASUFUMI;NAKAJIMA, TAKAO 发明人 ASAO, YASUFUMI;NAKAJIMA, TAKAO
分类号 G01H9/00 主分类号 G01H9/00
代理机构 代理人
主权项
地址