| 摘要 |
PROBLEM TO BE SOLVED: To provide a carbon nanotube producing apparatus and a carbon nanotube producing method capable of forming carbon nanotubes having a high density and a uniform in-plane CNT height on a substrate.SOLUTION: There is provided a carbon nanotube producing apparatus comprising a reaction chamber 2 that accommodates a substrate 3 that forms carbon nanotubes and a reactive gas supply mechanism for supplying a reactive gas 4 to the substrate 3 accommodated in the reaction chamber 2, in which the reactive gas supply mechanism has two or more shower plates 11 and 12 having a plurality of gas ejection holes, the shower plates being overlappingly arranged so that the reactive gas 4 passes therethrough in order and the reactive gas 4 is supplied to a carbon nanotube forming face of the substrate 3 and the shower plates 11 and 12 are arranged so that the ejection holes of the shower plates 11 and 12 that are adjacent to each other do not overlap each other in a gas ejection direction. |
