<p>A micro-scale pendulum structure. The structure includes a membrane having a peripheral support portion and an inner portion, and a micro-scale pendulum carried by the inner portion of the membrane.</p>
申请公布号
WO2013112156(A1)
申请公布日期
2013.08.01
申请号
WO2012US22694
申请日期
2012.01.26
申请人
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.;ABBOTT, JAMES ELMER JR.;WILLIAMS, JOHN L;KORNILOVICH, PAVEL
发明人
ABBOTT, JAMES ELMER JR.;WILLIAMS, JOHN L;KORNILOVICH, PAVEL
