发明名称 |
METHODS AND APPARATUS FOR SENSING A SUBSTRATE IN A LOAD CUP |
摘要 |
<p>Methods, apparatus, and systems are provided for detecting the presence of a substrate in a load cup. The invention includes a proximity sensor having a detection pad disposed below a contact surface of a load cup assembly and a target disposed on a lever member and adapted to move toward the detection pad when a substrate is placed on the lever member and adapted to move away from the detection pad when a substrate is removed from the lever member. Numerous additional aspects are disclosed.</p> |
申请公布号 |
WO2013112301(A1) |
申请公布日期 |
2013.08.01 |
申请号 |
WO2013US21184 |
申请日期 |
2013.01.11 |
申请人 |
APPLIED MATERIALS, INC |
发明人 |
LISCHKA, DAVID J.;ATKINSON, JIM K.;DOMIN, JONATHAN PAUL;LIU, ANDREW |
分类号 |
B24B37/04;B24B37/34;H01L21/683 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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