DEVICE AND METHOD FOR INSPECTING APPEARANCE OF WORK-PIECE

摘要

PROBLEM TO BE SOLVED: To provide a device for inspecting appearance of a work-piece, capable of correctly positioning a work-piece on a conveyance table and preventing electrostatic damage and characteristic deterioration on a work-piece.SOLUTION: A device 30 for inspecting appearance of a work-piece includes: a linear feeder 1 for conveying hexahedral shape work-pieces W; a conveyance table 2 by which work-pieces W from the linear feeder 1 are transferred and conveyed; transfer alignment means 21 for transferring work-pieces W from the linear feeder 1 onto the conveyance table 2 and aligning them; charging means 6A for charging the lower surface of the conveyance table 2 and holding work-pieces W; and imaging means 20 for capturing the images of six surfaces of each work-piece W. The transfer alignment means 21 includes: non-vibration part 4 positioned between the linear feeder 1 and the conveyance table 2; and an alignment guide 7 for aligning work-pieces W. The alignment guide 7 includes: a guide surface 7a having a linear shape in a plane view; and also vacuum suction means 17, 18 for performing vacuum suction of a space γ between the conveyance table 2 and the alignment guide 7.