REVIEW METHOD AND REVIEW DEVICE

摘要

PROBLEM TO BE SOLVED: To facilitate observation of a sample by reducing the man-hour of a user, that is required for a coordinate conversion between a coordinate system of inspection data input from an external inspection device and a coordinate system of a defect review device concerning a defect review method and defect review device using an electron microscope.SOLUTION: A capturing of a dark field optical microscopic image is repeated multiple times in order to obtain a dark field optical microscopic image optimum to calculate the barycentric coordinate of a defect and fine alignment is performed concerning a defect to be a review object on the basis of a sorting method with previously registered defect sizes and optical filter selection method of a dark field optical microscope.