发明名称 OXIDE MESOSTRUCTURED FILM AND METHOD FOR MANUFACTURING THE SAME
摘要 An oxide mesostructured film has a structure in which the orientation direction of cylindrical structures is a given direction throughout in the film plane, at least one peak appears in an angle region corresponding to a plane spacing of 8 nm or more, the number of atoms (X) of silicon to which an alkyl group having 8 or more carbon atoms is bonded to the number of atoms (Y) of silicon or metallic elements among elements constituting oxides of the oxide mesostructured film is 0.1 or more and 0.5 or lower in terms of the atomic number ratio (X/Y).
申请公布号 US2013196112(A1) 申请公布日期 2013.08.01
申请号 US201313750902 申请日期 2013.01.25
申请人 CANON KABUSHIKI KAISHA;CANON KABUSHIKI KAISHA 发明人 KUBO WATARU
分类号 B82B1/00;C23C16/04 主分类号 B82B1/00
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