发明名称 MEMORY ARRAYS AND METHODS OF FORMING SAME
摘要 Memory arrays and methods of forming the same are provided. One example method of forming a memory array can include forming a first conductive material having a looped feature using a self-aligning multiple patterning technique, and forming a first sealing material over the looped feature. A first chop mask material is formed over the first sealing material. The looped feature and the first sealing material are removed outside the first chop mask material.
申请公布号 US2013193398(A1) 申请公布日期 2013.08.01
申请号 US201213358882 申请日期 2012.01.26
申请人 PELLIZZER FABIO;RIGANO ANTONINO;MICRON TECHNOLOGY, INC. 发明人 PELLIZZER FABIO;RIGANO ANTONINO
分类号 H01L47/00;H01L21/02 主分类号 H01L47/00
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