| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction chuck capable of eliminating the deviation of a repulsive force by a smooth air flow irrespective of a position of an exhaust hole.SOLUTION: A suction chuck 10 includes a flat plate-like body 11, an opposing surface 31, a plurality of air ejection ports 41, and a plurality of exhaust holes 42. A compressed air flow passage is formed in the body 11. The opposing surface 31 is a surface of the body 11 on a side opposite to a workpiece. The air ejection ports 41 are opened at the opposing surface 31 for ejecting compressed air supplied from the flow passage. The exhaust holes 42 are opened in the opposing surface 31 around the air ejection ports 41, and formed through the body 11 in the thickness direction. Each air ejection port 41 is formed as a columnar space, and provided with three nozzle flow passages 44 opened opposing the inside of the space. Each nozzle flow passage 44 ejects compressed air in the direction along an inner wall of the columnar space. |
