| 发明名称 |
Piezoelektrisches Filmelement und piezoelektrische Filmvorrichtung |
| 摘要 |
To provide a piezoelectric film element, including: a substrate; and a piezoelectric film having an alkali niobium oxide-based perovskite structure represented by a composition formula (K1-xNax)yNbO3 (0<x<1) provided on the substrate, wherein the alkali niobium oxide-based composition falls within a range of 0.40@x@0.70 and 0.77@y@0.90, and further a ratio of an out-of-plane lattice constant (c) to an in-plane lattice constant (a) of the (K1-xNax)yNbO3 film is set in a range of 0.985@c/a@1.008. |
| 申请公布号 |
DE112011102278(T8) |
申请公布日期 |
2013.08.01 |
| 申请号 |
DE201111102278T |
申请日期 |
2011.03.30 |
| 申请人 |
HITACHI CABLE, LTD. |
发明人 |
WATANABE, KAZUTOSHI;NOMOTO, AKIRA;SUENAGA, KAZUFUMI;HORIKIRI, FUMIMASA;SHIBATA, KENJI |
| 分类号 |
H01L41/187;C04B35/00;H01L41/08;H01L41/09;H01L41/18;H01L41/22;H01L41/29;H01L41/319;H01L41/39 |
主分类号 |
H01L41/187 |
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