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发明名称
SEMICONDUCTOR THIN-FILM MANUFACTURING METHOD, SEMINCONDUCTOR THIN-FILM MANUFACTURING APPARATUS, SUSCEPTOR, AND SUSCEPTOR HOLDING TOOL
摘要
申请公布号
EP2549522(A4)
申请公布日期
2013.07.31
申请号
EP20110756047
申请日期
2011.02.25
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人
SHIOMI, HIROMU;SENDA, YASUHIKO;ITOH, SATOMI;FUJIKAWA, KAZUHIRO;SHIMADA, SHIGEKI;GENBA, JUN;TERAO, TAKEMI;FURUSHO, MASARU
分类号
H01L21/205;C23C16/455;C23C16/458;C23C16/48;H01L21/02;H01L29/16;H01L29/872
主分类号
H01L21/205
代理机构
代理人
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