发明名称 ELECTRICAL ERASABLE PROGRAMMBLE READ-ONLY MEMORY AND MANUFACTURING METHOD THEREFOR
摘要 An electrical erasable programmable read-only memory (EEPROM) including a floating transistor formed on a semiconductor substrate and a tunneling transistor formed on a semiconductor substrate and configured to erase electrons trapped in the floating transistor. The tunneling transistor has a source junction region and a drain junction region that are integrally joined by lateral diffusion. The EPROM maintains a small cell size without any additional mask process, and is useable as an MTP EEPROM because electrical erasure is enabled. In addition, the adjustment of the width of a gate constituting the tunneling transistor ensures an improved degree of freedom to adjust an erasure voltage can be enhanced.
申请公布号 KR101291750(B1) 申请公布日期 2013.07.31
申请号 KR20110105445 申请日期 2011.10.14
申请人 发明人
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
代理机构 代理人
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