PHOTONIC CRYSTAL STRUCTURE USING MULTI-SIZED NANOSPHERE AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A 2D photonic crystal structure using multi-sized nanospheres and a manufacturing method thereof are provided to expand morphological variety of a photonic crystal structure. CONSTITUTION: A photonic crystal layer (200) is formed on a substrate (100). A first nanosphere self-assembled monolayer array (300) is formed on the photonic crystal layer. The first nanosphere self-assembled monomer array is etched so that sizes of the first nonospheres are adjusted, and a plurality of nanospheres (300a) is formed being spaced apart from each other with a fixed distance therebetween. A second nanosphere self-assembled monolayer array (400) is formed on the first nanosphere self-assembled monolayer array. The second nanosphere self-assembled monomer array is etched so that a flower-type mask pattern (500) is formed. A mask film (600) is formed on the front surface of the flower-type mask pattern.