发明名称 |
METHOD OF FABRICATING SERVO INTEGRATED TEMPLATE |
摘要 |
The embodiments disclose a method of fabricating servo integrated templates including depositing a protective layer on servo zone resist layer patterns, patterning integrated data zone features into a substrate, depositing a protective layer on data zones and removing the servo zone protective layer and patterning integrated servo zone features into the substrate and removing the data zone protective layer creating a substrate template used in fabricating data and servo zone integrated patterned stacks.
|
申请公布号 |
US2013186856(A1) |
申请公布日期 |
2013.07.25 |
申请号 |
US201313798087 |
申请日期 |
2013.03.13 |
申请人 |
SEAGATE TECHNOLOGY LLC;SEAGATE TECHNOLOGY LLC |
发明人 |
XIAO SHUAIGANG;YANG XIAOMIN;HSU YUATZONG;WANG HONGYING;LEE KIM |
分类号 |
B05D3/10;B05C21/00;B05D3/00;G03F7/20 |
主分类号 |
B05D3/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|