CATALYST AND FORMULATIONS COMPRISING SAME FOR ALKOXYSILANES HYDROLYSIS REACTION IN SEMICONDUCTOR PROCESS

摘要

PURPOSE: A catalyst for hydrolyzing alkoxysilane in a semiconductor manufacturing process and a formulation containing the catalyst are provided to improve chemical stability of a formulation for a semiconductor manufacturing process by matching an alkoxy or aryloxy group in a silicon-containing precursor with an alkoxy or aryloxy group in a catalyst compound. CONSTITUTION: A formulation contains a silicon-containing precursor and a catalyst compound. The silicon-containing precursor is selected from alkoxy silane, aryloxy silane, or alkyl alkoxy silane. The catalyst compound contains haloalkoxyalkyl silane or haloaryloxyalkyl silane. Substituents are identical in the silicon-containing precursor and the catalyst compound. A formulation A contains a silicon-containing precursor, Si (OR1)nR24-n, containing alkoxyalkyl silane or aryloxy silane and a catalyst, XSi (OR1)nR23-n, containing haloalkoxyalkyl silane. A formulation B contains a silicon-containing precursor, R23-p (R1O)pSi-R3-Si (OR1)pR23-p, containing alkoxyalkyl silane or aryloxy silane and a catalyst, (R1O)mR22-m (X)Si-R3-Si (OR4)2R5, containing haloalkoxyalkyl silane or haloaryloxyalkyl silane.