发明名称 |
MICROMECHANICAL COMPONENT AND METHOD FOR THE PRODUCTION THEREOF |
摘要 |
<p>A micromechanical component includes: an adjustable element connected to a holder at least via a spring; a first sensor device with at least one first piezo-resistive sensor element, which first sensor device provides a first sensor signal relating to a first mechanical stress, the first piezo-resistive sensor element being situated on or in an anchoring region of the spring; and a second sensor device with at least one second piezo-resistive sensor element, which second sensor device provides a second sensor signal relating to a second mechanical stress, the second piezo-resistive sensor element being situated on or in an anchoring region of the spring.</p> |
申请公布号 |
EP2435354(B1) |
申请公布日期 |
2013.07.24 |
申请号 |
EP20100721776 |
申请日期 |
2010.05.18 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
NJIKAM NJIMONZIE, FREDERIC;SCHOCK, WOLFRAM;MUCHOW, JOERG;LESTYAN, ZOLTAN |
分类号 |
B81B3/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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