| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of correcting a laser irradiation position in laser beam machining where positional precision can be improved by a relatively simple method. <P>SOLUTION: A workpiece is subjected to test machining of the number of holes smaller than that upon actual machining, a first deviation between the position of each hole and an objective position is measured, and a reverse characteristic filter as data deviated by the same deviated amount to the direction opposite to the first deviation is created. The workpiece is subjected to test machining of second holes using coordinate data passed through the reverse characteristic filter, and a second deviation between the position of each hole and an objective position is measured. A regression expressing the deviation of the whole machining region in the actual machining is created by non-linear regression analysis from the second deviation, the objective position is substituted for the regression, so as to calculate an estimated deviation, and the estimated deviation is subtracted from the coordinate data passed through the reverse characteristic filter, thus a machining position is obtained. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
