发明名称 Interference filter, optical module, and electronic apparatus
摘要 An interference filter includes a pair of reflecting films, a first reflecting film and a second reflecting film, opposed to each other via a gap, the first reflecting film and the second reflecting film include an Ag-Sm-Cu alloy film or an Ag-Bi-Nd alloy film, the Ag-Sm-Cu alloy film includes Sm in an amount of 0.1 to 0.5 atomic %, and Cu in an amount of 0.1 to 0.5 atomic %, the sum of contents of Sm and Cu is equal to or lower than 1.0 atomic %, the Ag-Bi-Nd alloy film includes Bi in an amount of 0.1 to 3.0 atomic %, and Nd in an amount of 0.1 to 5.0 atomic %, and the thickness of the Ag-Sm-Cu alloy film or the Ag-Bi-Nd alloy film is 10 nm to 40 nm.
申请公布号 EP2618187(A2) 申请公布日期 2013.07.24
申请号 EP20130151443 申请日期 2013.01.16
申请人 SEIKO EPSON CORPORATION 发明人 SHINTO, SUSUMU;KITAHARA, KOJI;MATSUSHITA, TOMONORI
分类号 G02B5/28;G02B5/08;G02B26/00 主分类号 G02B5/28
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