| 摘要 |
PURPOSE: A thin film manufacturing device with a rotary plate is provided to reduce processing time and to improve the efficiency of producing a thin film by utilizing the rotary plate when coating a thin film with a spray-coating method. CONSTITUTION: A rotary plate (3) is rotated for the rotary motion of a substrate. A droplet spraying unit (7) sprays free cursor droplets onto the rotating substrate. A first rotary shaft (5), which is fixed onto the underside of the rotary plate, rotates the rotary plate. A second rotary shaft (11), which is joined to the first rotary shaft with a predetermined direction conversion member, transmits the torque to the first rotary shaft. A motor (1), which is connected to the second rotary shaft, transmits power.
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