发明名称 |
Silicon/gold seed structure for crystalline alignment in a film stack |
摘要 |
A silicon/gold (Si/Au) bilayer seed structure is located in a film stack between an amorphous or crystalline lower layer and an upper layer with a well-defined crystalline structure. The seed structure includes a Si layer on the generally flat surface of the lower layer and a Au layer on the Si layer. The Si/Au interface initiates the growth of the Au layer with a face-centered-cubic (fcc) crystalline structure with the (111) plane oriented in-plane. The upper layer grown on the Au layer has a fcc or hexagonal-close-packed (hcp) crystalline structure. If the upper layer is a fcc material its [111] direction is oriented substantially perpendicular to the (111) plane of the Au layer and if the upper layer is a hcp material, its c-axis is oriented substantially perpendicular to the (111) plane of the Au layer.
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申请公布号 |
US8492010(B2) |
申请公布日期 |
2013.07.23 |
申请号 |
US20100772179 |
申请日期 |
2010.05.01 |
申请人 |
HELLWIG OLAV;WELLER DIETER K.;HGST NETHERLANDS B.V. |
发明人 |
HELLWIG OLAV;WELLER DIETER K. |
分类号 |
G11B5/66 |
主分类号 |
G11B5/66 |
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