PLASMA PATTERNING APPARATUS, APPARATUS AND METHOD FOR MANUFACTURING OF SOLAR CELL USING THE SAME

摘要

PURPOSE: A plasma patterning apparatus and an apparatus and method for manufacturing a solar cell using the same are provided to improve productivity by patterning a thin film using plasma. CONSTITUTION: A body(110) has a plasma generation space and a bottom opening. A ground electrode(130) is formed in order to surround an outer surface of the body and is connected to a ground power source. A power electrode(140) is installed in the body in order to be spaced from the ground electrode at a predetermined distance. A gas supply part(160) supplies reaction gas to a plasma generation space. A power supply part supplies a plasma power source to a power electrode so that generated plasma is discharged to the outside through the bottom opening. [Reference numerals] (150) Power supply part; (160) Gas supply part