| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film forming device capable of suppressing an increase in a tact time for thin film formation even when the number of alignment marks for measuring an amount of expansion and contraction of an object are increased.SOLUTION: A coating stage holds an object. Image data of a thin film pattern to be formed in the object is stored in a storage device. A nozzle unit discharges droplets of a fluid material toward the object held on the coating stage. A conveying device coveys the object from a storage location to the coating stage. A first detector detects at least three alignment marks formed in the object during object conveyance by the conveying device. A control device calculates an amount of expansion and contraction of the object on the basis of the detection results of the first detector, corrects the image data stored in the storage device on the basis of the calculated amount of expansion and contraction, and forms a thin film pattern in the object by controlling the nozzle unit on the basis of the corrected image data. |
